Closing the loop: manage process flow execution and analytics.

Features

1. 01/ 05

   Traceable execution records

   Bind process intent to the physical wafers in your lot.

   A Fab Run instantiates a selected process flow version and binds its fabrication steps and associated recipes to the physical wafers in the lot. Plan a run by managing wafers and their routes, and assign schedules, personnel, execution instructions, and verification tasks.

   

2. 02/ 05

   Wafer splits and route comparison

   Know the exact route every wafer followed.

   High-flexibility process development rarely follows a single fixed route. Fab Run Studio tracks individual wafers through branched process flows and parameter splits, keeping each wafer associated with the exact route it followed.

   Compare simulated cross-sections for different branches side by side before or during execution to understand how process choices propagate through the device stack. Teams can identify route inconsistencies and potential integration issues before they become costly rework or failed wafers.

   

3. 03/ 05

   Metrology-informed statistical process control

   Link metrology and characterization results directly to the wafer, route, and recipe that produced them.

   Track critical dimensions, device specs, and process outputs.

   Fab Run Studio brings these results into statistical process control (SPC) and run-to-run analysis. Visualize wafer-level spatial variation with wafer maps, compare results across lots and runs, and monitor control charts for drift and fabrication anomalies. Automated rule checks, including established SPC patterns such as Western Electric rules, surface signals that FabuBlox FabAgents turn into deep insights for early recognition of yield excursions, predictive maintenance, and process optimization.

   

4. 04/ 05

   Run-to-run learning and process optimization

   Make every wafer teach the next.

   Measured outcomes should not end up as just another data point in a spreadsheet. Fab Run Studio connects results back to the process and facility tool instance that produced them, allowing teams to use each run to inform the next. FabuBlox FabAgents provide suggestions to refine a process flow, adapt a recipe, update a tool calibration, tighten control limits, adjust verification criteria, or plan the next experiment.

   With every Fab Run, the closed-loop learning context grows. Process history, past learnings, SPC and yield trends, metrology, and evolving tool behavior become part of the context FabAgents use to analyze each new run. Over time, this builds a unique model context for your team and facility, enabling more accurate predictions, stronger root-cause inference, and a deeper understanding of expected process and equipment drift to accelerate process development, optimization, and response to yield excursions.

5. 05/ 05

   Automated Fab Run reports

   Close the communication gap.

   A major bottleneck in agile fabrication environments is the creation of custom reports. Every Fab Run is unique, requiring a database query and analysis workflow that may only be used once.

   FabuBlox FabAgent generates custom exportable PDF reports that reflect the unique context and outcomes of a Fab Run. This automates the creation of consistent, highly customizable documentation for run reviews with team members or managers, without manually reconstructing the story of a run across separate files, dashboards, and charts.