Facility OS

Make your operational intelligence actionable with AI-native digital facility representations.

Increased technological complexity, rapid process development, and strict qualification standards demand high-flexibility nanofabrication environments. Those environments need a shared understanding of your facility that only a digital representation can provide.

FabuBlox Facility OS connects tool capabilities, rules, restrictions, recipes, and calibration data in a structured digital representation of your fab. It enables fab-aware process design while reducing your administrative burden.

Features

  1. Digital facility representation

    Capture the unique capabilities behind your equipment.

    Represent each tool in your fab through its available resources, operating constraints, and supported processes, supporting your users’ engineering decisions and AI-assisted discovery to design process flows with facility-specific context.

    A searchable facility library lets users pick the right tool for the job, or lets AI-powered tool matching find it for them.

    Browsing a facility’s tool library, then asking FabAgent to find dry etchers that take four-inch wafers.
  2. Recipe management

    Stop reinventing the wheel and preserve the knowledge behind each recipe.

    Organize and sync unit process recipes across the organization, making facility-provided and user-contributed recipes available for reuse with clear ownership and visibility. Capture the process goals and machine settings in a structured format.

    A PECVD tool’s facility recipes, each with its deposited material, film thickness, phases, and contributor.
  3. Calibration and characterization

    Connect recipes with measured fabrication outcomes.

    Store calibration and relevant characterization data alongside each recipe on each tool, giving visibility into high-flexibility environments. Engineers and FabAgent get a stronger basis for selecting parameters and adapting recipes to a target outcome within the current facility context.

    As recipes evolve, process flows stay informed and connected, with any changes highlighted for selective synchronization.

    Opening a dry etch recipe’s tool parameters phase by phase, then its calibration chart of measured etch rates.
  4. Compatibility analysis

    Keep facility constraints part of process planning and design.

    Define material usage, supported resources, and allowed parameter ranges for each tool to ensure process compatibility at the design stage.

    Structured material definitions, including class and mixtures, alongside layer stack cross-sections provide the detail needed to support complex material compatibility and contamination-control decisions.

    The materials and chemicals library, with a photoresist’s composition, classification, and process categories open.
  5. Agentic operational workflows

    Put facility knowledge to work across everyday operations.

    • Process request onboarding. Accelerate incoming fabrication requests and wafer intake with a structured review workflow, using AI-powered algorithmic checking to assess process requirements and flag relevant compatibility and contamination controls.
    • Automatic cost estimation. Generate initial cost estimates from requested process steps and configured facility pricing, helping teams assess project scope and prepare quotations with less manual calculation.

The foundation for next-gen fabs

Facility OS establishes a structured foundation of tools, recipes, calibration data, and operating constraints. Our vision is to connect that knowledge with live equipment signals and operational data. That unlocks agentic capabilities for predictive maintenance and intelligent supply chain management, and increasingly adaptive models of your fab.

Building towards digital twins for more intelligent, adaptive fabrication.

The FabuBlox platform: a closed-loop learning system for your fab

Build your facility-aware process flow in the Process Design Suite, then manage your Fab Run execution and enable closed-loop learning in Fab Run Studio.

Explore Process Design SuiteExplore Fab Run Studio

Make your facility’s knowledge actionable.

See how Facility OS can support your team, showcase your fabrication capabilities, or become part of a broader collaboration.